PolyU IR

PolyU Institutional Repository >
Applied Physics >
AP Journal/Magazine Articles >

Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/4344

Title: ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications
Authors: Yan, Z.
Zhou, X. Y.
Pang, Geoffrey Kin-hung
Zhang, T.
Liu, W. L.
Cheng, J. G.
Song, Z. T.
Feng, S. L.
Lai, L. H.
Chen, J. Z.
Wang, Y.
Subjects: Gold
Zinc compounds
II-VI semiconductors
Wide band gap semiconductors
Semiconductor thin films
Sputtered coatings
Thin film sensors
Acoustic resonators
Bulk acoustic wave devices
Crystal resonators
Semiconductor devices
Transmission electron microscopy
X-ray diffraction
Issue Date: 2-Apr-2007
Publisher: American Institute of Physics
Citation: Applied physics letters, 2 Apr. 2007, v. 90, no. 14, 143503, p. 1-3
Abstract: Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au/ZnO/Pt) and a Bragg reflector (ZnO/Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94 GHz) and mass sensitivity (8970 Hz cm²/ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies.
Description: DOI: 10.1063/1.2719149
Rights: © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Z. Yan et al., Appl. Phys. Lett. 90, 143503 (2007) and may be found at http://apl.aip.org/resource/1/applab/v90/i14/p143503_s1
Type: Journal/Magazine Article
URI: http://hdl.handle.net/10397/4344
ISSN: 0003-6951 (print)
1077-3118 (online)
Appears in Collections:AP Journal/Magazine Articles

Files in This Item:

File Description SizeFormat
Yan_ZnO-based_acoustic_resonator.pdf236.7 kBAdobe PDFView/Open

Facebook Facebook del.icio.us del.icio.us LinkedIn LinkedIn

All items in the PolyU Institutional Repository are protected by copyright, with all rights reserved, unless otherwise indicated.
No item in the PolyU IR may be reproduced for commercial or resale purposes.


© Pao Yue-kong Library, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong
Powered by DSpace (Version 1.5.2)  © MIT and HP
Feedback | Privacy Policy Statement | Copyright & Restrictions - Feedback