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|Title:||Dielectric properties of Ba₀.₆Sr₀.₄TiO₃ thin films using Pb₀.₃Sr₀.₇TiO₃buffer layers|
Hao, J. H.
Dielectric thin films
|Publisher:||American Institute of Physics|
|Source:||Applied physics letters, 17 Dec. 2007, v. 91, no. 25, 252908, p. 1-3.|
|Abstract:||Ba₀.₆Sr₀.₄TiO₃ (BST) thin films buffered with Pb₀.₃Sr₀.₇TiO₃(PST) at each side of the interface contact with electrodes (PST/BST/PST) were deposited on Pt/Ti/SiO₂/Si substrates. The dielectric properties of the films were measured using planar Pt/PST/BST/PST/Pt/Ti/SiO2/Si capacitor structures. The existence of a PST layer between the BST and Pt electrode can improve the dielectric properties of the BST film. The loss tangent of the multilayered films annealed at 750 °C was found to be 0.016 at 1 MHz and room temperature. The films showed a ∼ 31.7% tunability of the permittivity at an applied bias field of 0.85 MV/cm. This suggests that such films have potential applications for integrated device applications.|
|Rights:||© 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in S.-X. Wang et al., Appl. Phys. Lett. 91, 252908 (2007) and may be found at http://apl.aip.org/resource/1/applab/v91/i25/p252908_s1|
|Appears in Collections:||AP Journal/Magazine Articles|
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